Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5223113 | Apparatus for forming reduced pressure and for processing object | Satoshi Kaneko, Taichi Fugita, Toshihisa Nozawa, Yoichi Ueda, Yukimasa Yoshida +1 more | 1993-06-29 |
| 5221403 | Support table for plate-like body and processing apparatus using the table | Toshihisa Nozawa, Junichi Arami, Haruo Okano | 1993-06-22 |
| 5203945 | Plasma processing apparatus having driving control section | Takashi Yokota | 1993-04-20 |
| 5195866 | Conveying apparatus | Satoshi Kaneko | 1993-03-23 |
| 5161201 | Method of and apparatus for measuring pattern profile | Yasuhiro Kaga, Kei Hattori, Fumio Komatsu | 1992-11-03 |
| 5100508 | Method of forming fine patterns | Yukimasa Yoshida | 1992-03-31 |
| 5091050 | Dry etching method | Makoto Fujino, Masao Ito | 1992-02-25 |