Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4572956 | Electron beam pattern transfer system having an autofocusing mechanism | Toru Tojo, Toshiaki Shinozaki, Kazuyoshi Sugihara, Mitsuo Tabata, Chikara Itoh | 1986-02-25 |
| 4560278 | Fixed-slit type photoelectric microscope | Toshiaki Shinozaki | 1985-12-24 |
| 4480284 | Electrostatic chuck plate | Toru Tojo, Shunichi Sano | 1984-10-30 |
| 4469949 | Electron beam pattern transfer device and method for aligning mask and semiconductor wafer | Kazuyoshi Sugihara, Toshiaki Shinozaki, Toru Tojo | 1984-09-04 |
| 4467210 | Electron-beam image transfer device | Kazuyoshi Sugihara, Toru Tojo, Toshiaki Shinozaki | 1984-08-21 |
| 4366383 | Electron beam type pattern transfer apparatus | Shunichi Sano, Toshiaki Shinozaki | 1982-12-28 |