Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616063 | Polishing apparatus | Katsuya Okumura, Riichirou Aoki, Masako Kodera, Shirou Mishima, Atsushi Shigeta +3 more | 1997-04-01 |
| 5597341 | Semiconductor planarizing apparatus | Masako Kodera, Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Haruo Okano | 1997-01-28 |
| 5445996 | Method for planarizing a semiconductor device having a amorphous layer | Masako Kodera, Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Haruo Okano | 1995-08-29 |