Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9117738 | Interconnection of semiconductor device with graphene wire | Makoto Wada, Hisao Miyazaki, Atsunobu Isobayashi, Tatsuro SAITO, Tadashi Sakai | 2015-08-25 |
| 9117851 | Semiconductor device comprising a graphene wire | Makoto Wada, Yuichi Yamazaki, Atsunobu Isobayashi, Tatsuro SAITO | 2015-08-25 |
| 9117885 | Graphene interconnection and method of manufacturing the same | Tatsuro SAITO, Makoto Wada | 2015-08-25 |
| 9076795 | Semiconductor device and method of manufacturing the same | Tatsuro SAITO, Makoto Wada, Atsunobu Isobayashi, Tadashi Sakai | 2015-07-07 |
| 9030012 | Semiconductor device and manufacturing method thereof | Makoto Wada, Atsunobu Isobayashi, Tatsuro SAITO, Tadashi Sakai, Taishi ISHIKURA | 2015-05-12 |
| 8981569 | Semiconductor device with low resistance wiring and manufacturing method for the device | Tatsuro SAITO, Makoto Wada, Atsunobu Isobayashi, Yuichi Yamazaki | 2015-03-17 |
| 8981561 | Semiconductor device and method of manufacturing the same | Tatsuro SAITO, Makoto Wada, Atsunobu Isobayashi, Hisao Miyazaki, Tadashi Sakai | 2015-03-17 |
| 8907495 | Semiconductor device and manufacturing method thereof | Makoto Wada, Atsunobu Isobayashi, Tatsuro SAITO | 2014-12-09 |
| 8759983 | Semiconductor device | Makoto Wada, Kazuyuki Higashi | 2014-06-24 |
| 8648464 | Semiconductor device and manufacturing method thereof | Masayuki Kitamura, Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Atsuko Sakata +3 more | 2014-02-11 |
| 8546780 | Non-volatile memory device | Jun Iijima, Yasuyoshi Hyodo | 2013-10-01 |
| 8487449 | Carbon nanotube interconnection and manufacturing method thereof | Makoto Wada, Yuichi Yamazaki, Masayuki Katagiri, Masayuki Kitamura, Atsuko Sakata +2 more | 2013-07-16 |
| 8482126 | Semiconductor device | Makoto Wada, Yuichi Yamazaki, Atsuko Sakata | 2013-07-09 |
| 8264083 | Semiconductor device and semiconductor device manufacturing method | Hidefumi NAWATA, Kikuko Sugimae, Takamichi Tsuchiya | 2012-09-11 |
| 8022461 | Semiconductor device and method for fabricating semiconductor device | Makoto Wada, Kazuyuki Higashi | 2011-09-20 |
| 7215001 | Semiconductor device and method of manufacturing the same | — | 2007-05-08 |
| 7034398 | Semiconductor device having contact plug and buried conductive film therein | Kazuyuki Higashi | 2006-04-25 |
| 6573604 | Semiconductor device carrying memory and logic circuit on a chip and method of manufacturing the same | — | 2003-06-03 |
| 6555925 | Semiconductor device and producing method thereof | Kazuyuki Higashi, Noriaki Matsunaga, Tamao Takase, Hisashi Kaneko, Hideki Shibata | 2003-04-29 |
| 6368951 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Tetsuo Matsuda, Tadashi Iijima, Hisashi Kaneko +5 more | 2002-04-09 |
| 6342444 | Method of forming diffusion barrier for copper interconnects | Kazuyuki Higashi, Noriaki Matsunaga, Hiroshi Toyoda, Tetsuo Matsuda, Hisashi Kaneko | 2002-01-29 |
| 6313037 | Semiconductor device and method for manufacturing the same | Noriaki Matsunaga, Kazuyuki Higashi | 2001-11-06 |
| 6306756 | Method for production of semiconductor device | Masahiko Hasunuma, Sachiyo Ito, Keizo Shimamura, Hisashi Kaneko, Nobuo Hayasaka +3 more | 2001-10-23 |
| 6291891 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Tetsuo Matsuda, Tadashi Iijima, Hisashi Kaneko +5 more | 2001-09-18 |
| 6090701 | Method for production of semiconductor device | Masahiko Hasunuma, Sachiyo Ito, Keizo Shimamura, Hisashi Kaneko, Nobuo Hayasaka +3 more | 2000-07-18 |