Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12373974 | Shape measurement device and method for controlling same | Hideki Morii | 2025-07-29 |
| 10041779 | Surface shape measuring method, misalignment amount calculating method, and surface shape measuring device | — | 2018-08-07 |
| 9146256 | Probe assembly for inspecting power semiconductor devices and inspection apparatus using the same, the probe assembly having a probe block, a probe, and a cooling device | Katsuo Yasuta, Hideki Nei, Tatsuya Ishiwatari | 2015-09-29 |
| 9069008 | Inspection apparatus for semiconductor devices and chuck stage for the inspection apparatus that is movable with respect to the front and back side electrodes | Katsuo Yasuta, Hideki Nei | 2015-06-30 |
| 8471586 | Wafer prober for semiconductor inspection and inspection method | Kenichi Washio, Katsuo Yasuta, Umenori Sugiyama | 2013-06-25 |