Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9146256 | Probe assembly for inspecting power semiconductor devices and inspection apparatus using the same, the probe assembly having a probe block, a probe, and a cooling device | Katsuo Yasuta, Hikaru Masuta, Tatsuya Ishiwatari | 2015-09-29 |
| 9069008 | Inspection apparatus for semiconductor devices and chuck stage for the inspection apparatus that is movable with respect to the front and back side electrodes | Katsuo Yasuta, Hikaru Masuta | 2015-06-30 |