Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5804046 | Thin-film forming apparatus | Susumu Sawada, Yoshitaka Kakutani, Hironori Wada, Fumihiko Yanagawa, Roderick C. Mosely | 1998-09-08 |
| 5618397 | Silicide targets for sputtering | Osamu Kano, Yasuhiro Yamakoshi, Koichi Yasui | 1997-04-08 |
| 5487823 | Sputtering targets having life alarm function | Susumu Sawada, Hiroki Nakamura, Yoshihiro Sakaya | 1996-01-30 |
| 5464520 | Silicide targets for sputtering and method of manufacturing the same | Osamu Kano, Koichi Yasui, Yasuyuki Sato, Yasuhiro Yamakoshi, Hironori Wada +1 more | 1995-11-07 |
| 5460793 | Silicide targets for sputtering and method of manufacturing the same | Osamu Kano, Yasuhiro Yamakoshi, Koichi Yasui | 1995-10-24 |
| 5135629 | Thin film deposition system | Susumi Sawada, Osamu Kanou, Hironori Wada, Takakazu Seki | 1992-08-04 |