Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5466355 | Mosaic target | Tateo Ohhashi, Koichi Nakashima, Hideaki Fukuyo | 1995-11-14 |
| 5415829 | Sputtering target | Tateo Ohhashi, Takeo Okabe, Koichi Yasui, Hideaki Fukuyo | 1995-05-16 |
| 5135629 | Thin film deposition system | Susumi Sawada, Osamu Kanou, Hironori Wada, Junichi Anan | 1992-08-04 |