Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037883 | Enhanced productivity for an etch system through polymer management | Robert Chebi, Alfredo Granados, Jianqi Wang, Rajan Balesan | 2018-07-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10037883 | Enhanced productivity for an etch system through polymer management | Robert Chebi, Alfredo Granados, Jianqi Wang, Rajan Balesan | 2018-07-31 |