Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371784 | Gas management method and substrate processing system | Koji Sasaki, Katsuyuki Higashi | 2025-07-29 |
| 12205817 | Method for depositing film and film deposition system | Hitoshi Kato, Toru Ishii, Yuichiro Sase | 2025-01-21 |
| 11905595 | Film deposition apparatus and film deposition method | Hitoshi Kato, Toru Ishii, Yuichiro Sase | 2024-02-20 |
| 10734221 | Method of manufacturing semiconductor device and method of forming metal oxide film | Taiki KATO, Hisashi Higuchi, Kosuke Yamamoto, Ayuta Suzuki, Kazuyoshi Matsuzaki +2 more | 2020-08-04 |