Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065725 | Film forming apparatus and film forming method | Toshihiko Nagase, Atsuko Sakata, Kohei Nagata, Ryohei Kitao, Akifumi GAWASE +1 more | 2024-08-20 |
| 10062545 | Apparatus and method for processing substrate using ion beam | Yasushi Kamiya, Einstein Noel Abarra | 2018-08-28 |
| 9852879 | Ion beam processing method and ion beam processing apparatus | Yasushi Kamiya, Hiroshi Akasaka | 2017-12-26 |
| 9422623 | Ion beam generator and ion beam plasma processing apparatus | Einstein Noel Abarra, Yasushi Kamiya | 2016-08-23 |
| 9312102 | Apparatus and method for processing substrate using ion beam | Yasushi Kamiya, Einstein Noel Abarra | 2016-04-12 |