Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418250 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Gon-jun Kim, Vladimir Volynets, Dali Liu, Sang Jin An, Beom Jin Yoo +2 more | 2019-09-17 |
| 10249485 | Pulsed plasma analyzer and method for analyzing the same | Vladimir Volynets, Protopopov Vladimir, Young Do Kim, Sang Heon Lee, Sung Ho JANG | 2019-04-02 |