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Imprint apparatus, operation method of imprint apparatus, and article manufacturing method |
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Imprint method and article manufacturing method |
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Imprint apparatus, imprint method, and method of manufacturing article |
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Imprint method |
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Imprint apparatus |
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Imprint method for an imprint apparatus which transfers a pattern onto a substrate by using a mold |
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2018-03-20 |
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Imprint apparatus and method of manufacturing article |
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2017-10-24 |
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Imprint apparatus |
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2016-07-26 |
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Position detection apparatus, imprint apparatus, and position detection method |
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2016-03-15 |
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Imprint apparatus |
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2016-03-15 |
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Position detection apparatus, imprint apparatus, and position detection method |
Ken Minoda, Kazuhiko Mishima, Hironori Maeda |
2014-09-23 |
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Imprint apparatus and article manufacturing method |
Setsuo Yoshida, Noriyasu Hasegawa, Tatsuya Hayashi |
2014-03-25 |
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Measurement method and apparatus, and exposure apparatus |
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2010-11-02 |
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Measurement method and apparatus, exposure apparatus, exposure method, and adjusting method |
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2009-03-03 |
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System and method for polarization characteristic measurement of optical systems via centroid analysis |
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2008-12-23 |
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Reticle and optical characteristic measuring method |
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2008-09-09 |
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Reticle and optical characteristic measuring method |
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2008-05-20 |
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Exposure method and apparatus |
Seiya Miura |
2007-05-22 |
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Method and apparatus for measuring optical characteristic, and projection exposure apparatus using the same |
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2007-03-20 |
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Reticle and optical characteristic measuring method |
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2007-03-13 |
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Reticle and optical characteristic measuring method |
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2006-01-03 |
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Aberration measuring method and projection exposure apparatus |
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2005-11-01 |
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Focus measurement in projection exposure apparatus |
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