Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083892 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2011-12-27 |
| 7764483 | Semiconductor etching apparatus | Jin-Man Kim, Yun-Sik Yang, Sang-Ho Kim | 2010-07-27 |
| 7578944 | Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same | Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2009-08-25 |
| 7193369 | Method for generating gas plasma | Dae-Kyu Choi, Do-In Bae, Yun-Sik Yang, Wan-Goo Hwang, Jin-Man Kim | 2007-03-20 |
| 6824617 | Input/output valve switching apparatus of semiconductor manufacturing system | Yun-Sik Yang, Jin-Man Kim, Chang Hyun Jo | 2004-11-30 |
| 6816029 | RF matching unit | Dae-Kyu Choi, Sang-Mun Chon, Yun-Sik Yang, Jin-Man Kim | 2004-11-09 |
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Jin-Man Kim, Yun-Sik Yang, Sang-Jun Chun | 2004-02-03 |
| 6202590 | Plasma apparatus for fabricating semiconductor devices | Kiw-Sang Kim, In Sung Park | 2001-03-20 |