Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134614 | Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus | Mitsuo Tada, Hirofumi Ichihara, Kenya Ito, Tamami Takahashi | 2018-11-20 |
| 7854646 | Substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Koichi Fukaya, Mitsuo Tada, Taro Takahashi | 2010-12-21 |
| 7714572 | Method of detecting characteristics of films using eddy current | Mitsuo Tada, Hironobu Yamasaki | 2010-05-11 |
| 7670206 | Substrate polishing apparatus and substrate polishing method | Tetsuji Togawa, Koichi Fukaya, Mitsuo Tada, Taro Takahashi | 2010-03-02 |
| 7508201 | Eddy current sensor | Mitsuo Tada | 2009-03-24 |
| 7078894 | Polishing device using eddy current sensor | Mitsuo Tada, Hironobu Yamasaki | 2006-07-18 |
| 7046001 | Frequency measuring device, polishing device using the same and eddy current sensor | Mitsuo Tada, Hironobu Yamasaki | 2006-05-16 |
| 6935935 | Measuring apparatus | Mitsuo Tada | 2005-08-30 |
| 6746319 | Measuring apparatus | Mitsuo Tada | 2004-06-08 |