Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7361605 | System and method for removal of photoresist and residues following contact etch with a stop layer present | Stephen E. Savas | 2008-04-22 |
| 6805139 | Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing | Stephen E. Savas, John Zajac, Robert Guerra | 2004-10-19 |
| 6536449 | Downstream surface cleaning process | Craig Ranft, Robert Guerra, Brady Cole | 2003-03-25 |
| 6379576 | Systems and methods for variable mode plasma enhanced processing of semiconductor wafers | Leroy Luo, Rene George, Stephen E. Savas, Craig Ranft, Robert Guerra | 2002-04-30 |