Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692749 | Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck | Edward K. McIntyre | 2020-06-23 |
| 9236216 | In-vacuum high speed pre-chill and post-heat stations | William Davis Lee, Stanley W. Stone | 2016-01-12 |
| 8450701 | Vacuum system cold trap filter | James Gregg, Denis A. Robitaille, William Davis Lee | 2013-05-28 |
| 7531819 | Fluorine based cleaning of an ion source | William F. DiVergilio, Daniel R. Tieger, Christopher W. Hodgdon, Sean Joyce | 2009-05-12 |