Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815803 | Multilayer extreme ultraviolet reflector materials | Binni Varghese, Vibhu Jindal | 2023-11-14 |
| 11789358 | Extreme ultraviolet mask blank defect reduction | Vibhu Jindal, Weimin Li, Sanjay Bhat, Azeddine Zerrade | 2023-10-17 |
| 11782337 | Multilayer extreme ultraviolet reflectors | Herng Yau Yoong, Vibhu Jindal | 2023-10-10 |
| 11762278 | Multilayer extreme ultraviolet reflectors | Vibhu Jindal, Herng Yau Yoong | 2023-09-19 |
| 11720013 | Graded interface in Bragg reflector | Vibhu Jindal, Weimin Li, Shuwei Liu | 2023-08-08 |
| 11669008 | Extreme ultraviolet mask blank defect reduction methods | Sanjay Bhat, Shiyu Liu, Binni Varghese, Vibhu Jindal, Azeddine Zerrade | 2023-06-06 |
| 11659779 | Memory cell and method of forming the same | Wendong Song, Jun Ding, Ernult Franck Gerard | 2023-05-23 |
| 11639544 | Physical vapor deposition system and processes | Sanjay Bhat, Vibhu Jindal | 2023-05-02 |
| 11630385 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Vibhu Jindal, Azeddine Zerrade | 2023-04-18 |
| 11608541 | Manufacturing method for high silicon grain oriented electrical steel sheet | Huabing Zhang, Shuangjie Chu, Guobao Li, Baojun LIU, Yongjie Yang +3 more | 2023-03-21 |
| 11604151 | Surface topography measurement apparatus and method | Weimin Li, Vibhu Jindal, Sanjay Bhat | 2023-03-14 |
| 11599016 | Physical vapor deposition system and processes | Vibhu Jindal, Sanjay Bhat | 2023-03-07 |
| 11557473 | System and method to control PVD deposition uniformity | Vibhu Jindal, Sanjay Bhat | 2023-01-17 |
| 11556053 | Extreme ultraviolet mask blank hard mask materials | Shuwei Liu, Vibhu Jindal, Azeddine Zerrade | 2023-01-17 |
| 11542595 | Physical vapor deposition system and processes | Vibhu Jindal, Sanjay Bhat | 2023-01-03 |
| 11537040 | Extreme ultraviolet mask blank hard mask materials | Shuwei Liu, Vibhu Jindal, Azeddine Zerrade | 2022-12-27 |
| 11480866 | Method and apparatus to anneal EUV mask blank | Herng Yau Yoong, Ribhu Gautam, Sanjay Bhat, Vibhu Jindal | 2022-10-25 |
| 11480865 | Method and apparatus to improve EUV mask blank flatness | Vibhu Jindal, Sanjay Bhat, Vinodh Ramachandran | 2022-10-25 |
| 11467499 | System and method of measuring refractive index of EUV mask absorber | Vibhu Jindal, Huajun Liu, Herng Yau Yoong | 2022-10-11 |
| 11422096 | Surface topography measurement apparatus and method | Weimin Li, Vibhu Jindal, Sanjay Bhat | 2022-08-23 |
| 11390940 | System and method to control PVD deposition uniformity | Vibhu Jindal, Sanjay Bhat | 2022-07-19 |
| 11385536 | EUV mask blanks and methods of manufacture | Vibhu Jindal | 2022-07-12 |
| 11366379 | Extreme ultraviolet mask with embedded absorber layer | Vibhu Jindal | 2022-06-21 |
| 11366059 | System and method to measure refractive index at specific wavelengths | Vibhu Jindal, Huajun Liu, Herng Yau Yoong | 2022-06-21 |
| 11365475 | Physical vapor deposition chamber cleaning processes | Vibhu Jindal, Shiyu Liu, Sanjay Bhat, Shuwei Liu | 2022-06-21 |