Issued Patents All Time
Showing 1–25 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10185222 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2019-01-22 |
| 9910370 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2018-03-06 |
| 9785057 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2017-10-10 |
| 9632427 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2017-04-25 |
| 9587977 | Boresight error monitor for laser radar integrated optical assembly | Daniel Gene Smith | 2017-03-07 |
| 9304409 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2016-04-05 |
| 9244363 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Michael Sogard | 2016-01-26 |
| 9086636 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2015-07-21 |
| 9025043 | Image segmentation from focus varied images using graph cuts | Li Hong, Mark Takita | 2015-05-05 |
| 9007561 | Immersion lithography apparatus with hydrophilic region encircling hydrophobic region which encircles substrate support | — | 2015-04-14 |
| 8953250 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2015-02-10 |
| 8937725 | Measurement assembly including a metrology system and a pointer that directs the metrology system | — | 2015-01-20 |
| 8830443 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2014-09-09 |
| 8810915 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2014-08-19 |
| 8599488 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2013-12-03 |
| 8582119 | Large scale metrology apparatus and method | Daniel Gene Smith, Lloyd Frederick Holland | 2013-11-12 |
| 8493545 | Cleanup method for optics in immersion lithography supplying cleaning liquid onto a surface of object below optical element, liquid supply port and liquid recovery port | Hidemi Kawai | 2013-07-23 |
| 8243253 | Lyophobic run-off path to collect liquid for an immersion lithography apparatus | — | 2012-08-14 |
| 8094379 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2012-01-10 |
| 8059258 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2011-11-15 |
| 8018657 | Optical arrangement of autofocus elements for use with immersion lithography | — | 2011-09-13 |
| 7969552 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-06-28 |
| 7965376 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-06-21 |
| 7932989 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2011-04-26 |
| 7929111 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Douglas C. Watson | 2011-04-19 |