Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11599027 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Hans Erik KATTOUW, Bearrach Moest | 2023-03-07 |
| 11360395 | Control method for a scanning exposure apparatus | Frank Staals | 2022-06-14 |
| 11199782 | Lithographic process and apparatus and inspection process and apparatus | Wim Tjibbo Tel, Hans Erik KATTOUW, Bearrach Moest | 2021-12-14 |