Issued Patents All Time
Showing 25 most recent of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313968 | Reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Masanori Nakagawa | 2025-05-27 |
| 12135496 | Reflective mask blank and reflective mask | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2024-11-05 |
| 12111566 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE | 2024-10-08 |
| 12105413 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Yohei IKEBE | 2024-10-01 |
| 12072619 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask and semiconductor device | Masanori Nakagawa | 2024-08-27 |
| 12025911 | Reflective structure, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2024-07-02 |
| 12019366 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask and semiconductor device | Masanori Nakagawa | 2024-06-25 |
| 11880130 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2024-01-23 |
| 11852964 | Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device | Takahiro Onoue | 2023-12-26 |
| 11815806 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE | 2023-11-14 |
| 11815807 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Yohei IKEBE | 2023-11-14 |
| 11681214 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto | 2023-06-20 |
| 11561463 | Substrate with conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Masanori Nakagawa | 2023-01-24 |
| 11550215 | Reflective mask blank, reflective mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Yohei IKEBE | 2023-01-10 |
| 11531264 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE | 2022-12-20 |
| 11480867 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2022-10-25 |
| 11281090 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Yohei IKEBE | 2022-03-22 |
| 11262647 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Kazuhiro Hamamoto | 2022-03-01 |
| 11249385 | Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device | Yohei IKEBE | 2022-02-15 |
| 11187972 | Reflective mask blank, method of manufacturing reflective mask and method of manufacturing semiconductor device | Yohei IKEBE | 2021-11-30 |
| 11131921 | Method for manufacturing reflective mask blank, and method for manufacturing reflective mask | Kazuhiro Hamamoto, Yohei IKEBE | 2021-09-28 |
| 11048159 | Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device | Takahiro Onoue | 2021-06-29 |
| 11003068 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2021-05-11 |
| 10996554 | Substrate with an electrically conductive film, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Takumi Kobayashi, Kazuhiro Hamamoto, Tatsuo Asakawa | 2021-05-04 |
| 10921705 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE | 2021-02-16 |