Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811606 | Manufacturing method for calcium fluoride and calcium fluoride for photolithography | Shigeru Sakuma, Kazuo Kimura, Shuuichi Takano | 2004-11-02 |
| 6332922 | Manufacturing method for calcium fluoride and calcium fluoride for photolithography | Shigeru Sakuma, Kazuo Kimura, Shuuichi Takano | 2001-12-25 |
| 6146456 | Method for annealing single crystal fluoride and method for manufacturing the same | Shuuichi Takano | 2000-11-14 |
| 6123764 | Manufacturing method for calcium fluoride crystal and processing method for calcium fluoride powder | Kazuo Kimura, Shuuichi Takano | 2000-09-26 |
| 6061174 | Image-focusing optical system for ultraviolet laser | Masaki Shiozawa, Shigeru Sakuma, Norio Komine, Seishi Fujiwara, Hiroki Jinbo | 2000-05-09 |
| 5978070 | Projection exposure apparatus | Shigeru Sakuma, Masaki Shiozawa | 1999-11-02 |