Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7036673 | Lot management production method and product carrying container | — | 2006-05-02 |
| 6655000 | Lot management production method and product carrying container | — | 2003-12-02 |
| 6320737 | Electrostatic chucking device | Shinsuke Hirano | 2001-11-20 |
| 6235655 | Semiconductor manufacturing system and semiconductor manufacturing method | — | 2001-05-22 |
| 6204193 | Method for etching | — | 2001-03-20 |
| 6174408 | Method and apparatus for dry etching | Shingo Kadomura, Shinsuke Hirano | 2001-01-16 |
| 6084763 | Method of holding wafer, method of removing wafer and electrostatic chucking device | Shinsuke Hirano | 2000-07-04 |
| 6063710 | Method and apparatus for dry etching with temperature control | Shingo Kadomura, Shinsuke Hirano | 2000-05-16 |
| 5981913 | Static electricity chuck and wafer stage | Shingo Kadomura, Shinsuke Hirano, Kinya Miyashita, Seiichirou Miyata, Yoshiaki Tatsumi | 1999-11-09 |
| 5968273 | Wafer stage for manufacturing a semiconductor device | Shingo Kadomura, Shinsuke Hirano, Kinya Miyashita, Yoshiaki Tatsumi, Seiichirou Miyata | 1999-10-19 |
| 5431769 | Method and system for plasma treatment | Toshiro Kisakibaru, Akira Kojima, Takayuki Fukunaga, Yoshinori Hata, Yasushi Kato +2 more | 1995-07-11 |