Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5432608 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Shinya Nakagawa, Takayoshi Oosakaya, Nobuyuki Iriki | 1995-07-11 |
| 5260771 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Shinya Nakagawa, Takayoshi Oosakaya, Nobuyuki Iriki | 1993-11-09 |
| 5094539 | Method of making semiconductor integrated circuit, pattern detecting method, and system for semiconductor alignment and reduced stepping exposure for use in same | Susumu Komoriya, Shinya Nakagawa, Takayoshi Oosakaya, Nobuyuki Iriki | 1992-03-10 |
| 4795720 | Method for producing semiconductor devices and cutting fuses | Morio Inoue, Mikio Hongo | 1989-01-03 |
| 4609566 | Method and apparatus for repairing defects on a photo-mask pattern | Mikio Hongo, Katsurou Mizukoshi, Tateoki Miyauchi, Yasuhiro Koizumi | 1986-09-02 |
| 4463073 | Method and apparatus for redressing defective photomask | Tateoki Miyauchi, Katsuro Mizukoshi, Mikio Hongo, Masao Mitani, Masaaki Okunaka +1 more | 1984-07-31 |