Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8796613 | Encoder apparatus using liquid to suppress detection failure | — | 2014-08-05 |
| 8797506 | Exposure apparatus, exposure method, and device fabrication method | Motokatsu Imai | 2014-08-05 |
| 8760622 | Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method | — | 2014-06-24 |
| 8710425 | Encoder that optically detects positional information of a moving body from different optical paths lengths | Akihiro Watanabe | 2014-04-29 |
| 8710426 | Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions | Akihiro Watanabe, Toru Imai | 2014-04-29 |
| 8395110 | Encoder apparatus using liquid to suppress detection failure | — | 2013-03-12 |
| 8390780 | Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method | Toru Imai, Akihiro Watanabe | 2013-03-05 |
| 8272544 | Exposure apparatus, exposure method, and device fabrication method | Motokatsu Imai | 2012-09-25 |
| 8222594 | Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element | Toru Imai, Akihiro Watanabe | 2012-07-17 |
| 8208128 | Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method | — | 2012-06-26 |
| 8064037 | Immersion exposure apparatus and device manufacturing method with no liquid recovery during exposure | Hiroyuki Nagasaka, Yuuki Ishii | 2011-11-22 |
| 7932996 | Exposure apparatus, exposure method, and device fabrication method | Motokatsu Imai | 2011-04-26 |
| 7723671 | Positional information detecting device | Toru Imai, Akihiro Watanabe | 2010-05-25 |
| 7601947 | Encoder that optically detects positional information of a scale | Toru Imai, Akihiro Watanabe | 2009-10-13 |
| 6646715 | Scanning exposure apparatus and method with run-up distance control | — | 2003-11-11 |
| 6633363 | Scanning exposure apparatus and method | — | 2003-10-14 |
| 6490025 | Exposure apparatus | Masato Takahashi | 2002-12-03 |
| 6337733 | Apparatus including a motor-driven stage for exposing a photosensitive substrate, and method of making such apparatus | — | 2002-01-08 |
| 6260282 | Stage control with reduced synchronization error and settling time | Bausan Yuan, Hideyaki Hashimoto | 2001-07-17 |
| 6259511 | Scanning type exposure apparatus | Toshio Ueda | 2001-07-10 |
| 6188464 | Exposure apparatus | — | 2001-02-13 |
| 5978071 | Projection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stage | Hideyuki Miyajima, Kazuya Ota | 1999-11-02 |
| 5969800 | Scanning exposure apparatus and method | — | 1999-10-19 |
| 5907392 | Exposure apparatus | — | 1999-05-25 |
| 5877845 | Scanning exposure apparatus and method | — | 1999-03-02 |