Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320763 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman | 2025-06-03 |
| 11519719 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Antonio Arion Gellineau | 2022-12-06 |
| 11313816 | Full beam metrology for x-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman | 2022-04-26 |
| 10775323 | Full beam metrology for X-ray scatterometry systems | Antonio Arion Gellineau, Thaddeus Gerard Dziura, John J. Hench, Andrei Veldman | 2020-09-15 |
| 10767978 | Transmission small-angle X-ray scattering metrology system | Andrei V. Shchegrov, Antonio Arion Gellineau | 2020-09-08 |
| 10748736 | Liquid metal rotating anode X-ray source for semiconductor metrology | — | 2020-08-18 |
| 10580610 | Cold cathode switching device and converter | Timothy John Sommerer, Joseph Darryl Michael, David J. Smith | 2020-03-03 |