| 7270136 |
Apparatus for cleaning the edges of wafers |
Jung-Gwan Kim, Cheol-Nam Yoon, Jeong Ho Lee |
2007-09-18 |
| 7008306 |
Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface |
Cheol-Nam Yoon |
2006-03-07 |
| 6436809 |
Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices made using this method |
Gyu-hwan Kwag, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more |
2002-08-20 |
| 6232228 |
Method of manufacturing semiconductor devices, etching composition for manufacturing semiconductor devices, and semiconductor devices made using the method |
Gyu-hwan Kwag, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more |
2001-05-15 |
| 6140233 |
Method of manufacturing semiconductor devices, etching compositions for manufacturing semiconductor devices, and semiconductor devices thereby |
Gyu-hwan Kwag, Kyung-Seuk Hwang, Jun-ing Gil, Sang-Oh Park, Dae Hoon KIM +2 more |
2000-10-31 |
| 6059986 |
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof |
Jae-Hyung Jung, Young-hwan Yun, Min-sang Yun |
2000-05-09 |
| 5944939 |
Wet station apparatus having quartz heater monitoring system and method of monitoring thereof |
Jae-Hyung Jung, Young-hwan Yun, Min-sang Yun |
1999-08-31 |
| 5843850 |
Method of stripping a nitride layer from a wafer and wet etching apparatus using the same |
Dong Min Shin, Seung-ho Jun, Tae-Juon Kim |
1998-12-01 |
| 5827396 |
Device for turning a wafer during a wet etching process |
Pyeong Sik Jeon, Young-hwan Yun, Sang-young Moon |
1998-10-27 |
