Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589360 | Drying system for drying semiconductor wafers and method of drying wafers using the same | Hyoung-Chul Choi | 2003-07-08 |
| 5827396 | Device for turning a wafer during a wet etching process | Se-Jong Ko, Young-hwan Yun, Sang-young Moon | 1998-10-27 |