Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372322 | EUV mask blank, photomask manufactured by using the EUV mask blank, lithography apparatus using the photomask and method of fabricating semiconductor device using the photomask | Ho Yeon Kim, Seong Chui Hong | 2022-06-28 |
| 10915015 | EUV mask blank, photomask manufactured by using the EUV mask blank, lithography apparatus using the photomask and method of fabricating semiconductor device using the photomask | Ho Yeon Kim, Seong-Chul Hong | 2021-02-09 |
| 10338477 | Lithography apparatus | Do Hyung Kim | 2019-07-02 |
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Hwan-Seok Seo, In-Sung Kim, Tae Geun Kim | 2017-05-09 |
| 9588413 | Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device | Sang Hyun Kim, Dong Gun Lee | 2017-03-07 |
| 9465286 | Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device | Sang Hyun Kim, Dong Gun Lee | 2016-10-11 |
| 9239516 | Method of manufacturing reflective extreme ultraviolet mask | Tae Geun Kim, Dong-Wan Kim, Dong Gun Lee | 2016-01-19 |
| 9176375 | Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit | Sang Hyun Kim, Dong Gun Lee, Chalykh Roman, Mun Ja Kim | 2015-11-03 |
| 9170480 | Reflective extreme ultraviolet mask and method of forming a pattern using the same | Dong Gun Lee, Tae Geun Kim | 2015-10-27 |
| 9025624 | Beam generator | Dong Gun Lee, Hwan-Seok Seo | 2015-05-05 |
| 8968969 | Reflective extreme ultraviolet mask and method of manufacturing the same | Tae Geun Kim, Dong-Wan Kim, Dong Gun Lee | 2015-03-03 |
| 8779403 | Apparatus and method for generating extreme ultra violet radiation | Dong Gun Lee, Eok Kim, Jong Ju Park | 2014-07-15 |
| 8637840 | EUV projection lens and optic system having the same | Dong Gun Lee, Hwan-Seok Seo | 2014-01-28 |
| 8470500 | Reflective extreme ultraviolet mask | Dong Gun Lee, Tae Geun Kim | 2013-06-25 |
| 8422760 | System for monitoring haze of a photomask | Dong Gun Lee, Jae-Hyuck Choi, Jin-sik Jung | 2013-04-16 |
| 8416665 | Method of and apparatus for recording data on optical recording medium | Yong-jin Ahn, In-sik Park, Kyung-geun Lee, Chang-jin Yang, Tatsuhiro Otsuka +1 more | 2013-04-09 |
| 8335038 | Apparatus for measuring aerial image of EUV mask | Dong Gun Lee | 2012-12-18 |
| 8335039 | Method of measuring aerial image of EUV mask | Dong Gun Lee | 2012-12-18 |
| 8138483 | Method of measuring phase of phase shift mask | Dong Gun Lee | 2012-03-20 |
| 8119309 | Reflective photomask and method of fabricating, reflective illumination system and method of process using the same | Dong Gun Lee, Hwan-Seok Seo, In-Sung Kim | 2012-02-21 |
| 8018817 | Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor | Kyung-geun Lee, Yong-jin Ahn, In-sik Park, Du-seop Yoon | 2011-09-13 |
| 7821714 | Apparatus and method for measuring aerial image of EUV mask | Dong Gun Lee | 2010-10-26 |
| 7807318 | Reflective photomask and method of fabricating the same | Jin Hong Park, Han-ku Cho, Sang-Gyun Woo, Suk-Joo Lee | 2010-10-05 |
| 7724628 | Method and apparatus for recording data on optical recording medium | Yong-jin Ahn, In-sik Park, Kyung-geun Lee, Chang-jin Yang, Tatsuhiro Otsuka +2 more | 2010-05-25 |
| 7693023 | Method and apparatus for recording data on optical recording medium | Yong-jin Ahn, In-sik Park, Kyung-geun Lee, Chang-jin Yang, Tatsuhiro Otsuka +2 more | 2010-04-06 |