Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283522 | Planarization apparatus, planarization process, and method of manufacturing an article | Seth J. Bamesberger, Ozkan Ozturk, Christopher Ellis Jones | 2025-04-22 |
| 12165903 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Seth J. Bamesberger, Byung-Jin Choi | 2024-12-10 |
| 12153342 | Nanofabrication method with correction of distortion within an imprint system | Anshuman Cherala | 2024-11-26 |
| 11728203 | Chuck assembly, planarization process, apparatus and method of manufacturing an article | Seth J. Bamesberger, Byung-Jin Choi | 2023-08-15 |
| 11562924 | Planarization apparatus, planarization process, and method of manufacturing an article | Seth J. Bamesberger, Ozkan Ozturk, Christopher Ellis Jones | 2023-01-24 |
| 11249405 | System and method for improving the performance of a nanoimprint system | Byung-Jin Choi | 2022-02-15 |
| 11145535 | Planarization process, apparatus and method of manufacturing an article | Byung-Jin Choi, Seth J. Bamesberger | 2021-10-12 |
| 11020894 | Safe separation for nano imprinting | Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid, Mario Johannes Meissl +4 more | 2021-06-01 |
| 9651862 | Drop pattern generation for imprint lithography with directionally-patterned templates | Edward Brian Fletcher, Gerard Schmid, Niyaz Khusnatdinov, Yeshwanth Srinivasan, Weijun Liu +1 more | 2017-05-16 |
| 8968620 | Safe separation for nano imprinting | Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid, Mario Johannes Meissl +4 more | 2015-03-03 |