| 12372885 |
Substrate processing apparatus and method of fabricating semiconductor device using the same |
Cha-Won Koh, Sang Joon Hong, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more |
2025-07-29 |
| 12281757 |
Pressure vessel |
Sang Jin Jeon, Jae Sung Park |
2025-04-22 |
| 12270594 |
Refrigerator |
Kyeonghun Kim |
2025-04-08 |
| 11927890 |
Substrate processing apparatus and method of fabricating semiconductor device using the same |
Cha-Won Koh, Sang Joon Hong, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more |
2024-03-12 |
| 11733616 |
System for supplying photoresist and method for fabricating semiconductor device using the same |
Takashi Sasa, Kyoung-whan Oh, Sang Ho Lee, Ho-Kyun Kim, Ju-Hyung Lee |
2023-08-22 |
| 11726406 |
Method of coating a photoresist and apparatus for performing the same |
Sunghwan Kim, Ho-Young Kim, Dongwook Kim, Sungjin Kim, Chaehung Lim +3 more |
2023-08-15 |
| 11456195 |
Wafer processing apparatus and wafer processing method using the same apparatus |
Youngho HWANG, Sungyong Park, Eunseok SEO, Hyeongseok Jo |
2022-09-27 |
| 11315817 |
Apparatus for transferring wafer, method for transferring wafer using the same with three sensors |
Euijin Kim, Hyungjong Kim, Juno Park |
2022-04-26 |
| 11027394 |
Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same |
Jieun Yang, Dong-il Yoon, Taemin Earmme, Gui Hyun Cho, Jong-Hwi Seo +1 more |
2021-06-08 |
| 10767814 |
Pressure vessel equipped with permeated gas discharging structure |
Jae Han Chung, Hyun Lee, Ki Ho Hwang, Gye Hyoung YOO, Jong Lyul Kim |
2020-09-08 |
| 10553464 |
System and method for controlling semiconductor manufacturing facility, method of manufacturing integrated circuit using the system and method, and method of manufacturing processor using the system and method |
Jae Won Jeong, Yi Jin, Chang Gi Min, Jin Woo Lee, Yong Won Choi +1 more |
2020-02-04 |
| 10274132 |
Multi-sealed nozzle and pressure vessel including the same |
Jae Han Chung, Chang-Ho Kim, Ki Ho Hwang, Jong Lyul Kim, Do Yeun Kim |
2019-04-30 |
| 9889556 |
Link structure |
Sun Ho Kim, Ki Hoon Nam, Tae Min Earmme, Jae Chul Hwang |
2018-02-13 |
| 9316357 |
Pressure vessel |
Do Yeon Kim, Sang Jin Jeon, Sung-Chul Kim, Bong Won Choi |
2016-04-19 |
| 8410700 |
Electrodeless lighting system and control method thereof |
Kyusuk Hwang, Sungkyeom Kim, Jeongwon Kim |
2013-04-02 |
| 8378582 |
Plasma lighting system |
Jeongwon Kim, Jonggil Jun, Yongkwang Kim, Gyusuk Hwang, Jungsu PARK +8 more |
2013-02-19 |
| 7719161 |
Method of designing rotary thermal actuator and rotary thermal actuator |
Yoon Young Kim |
2010-05-18 |
