Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315817 | Apparatus for transferring wafer, method for transferring wafer using the same with three sensors | Euijin Kim, Hyungjong Kim, Seok Heo | 2022-04-26 |
| 9640417 | Cassette transfer apparatus and cassette transferring method using the same | Nam-Su Yuk, Kyung Won Kang, Tae Hun Kim, Se-Ho Park, Yong Won Lee | 2017-05-02 |