| 10466601 |
Alignment sensor for lithographic apparatus |
Alessandro Polo, Simon Gijsbert Josephus Mathijssen, Patricius Aloysius Jacobus Tinnemans, Ronan James Havelin |
2019-11-05 |
| 8164739 |
Controlling fluctuations in pointing, positioning, size or divergence errors of a beam of light for optical apparatus |
— |
2012-04-24 |
| 8164740 |
Illumination system coherence remover with two sets of stepped mirrors |
Huibert Visser, Jacob Klinkhamer, Lev Ryzhikov, Adel Joobeur, Rob Vink +1 more |
2012-04-24 |
| 8159651 |
Illumination system coherence remover with a series of partially reflective surfaces |
Huibert Visser, Jacob Klinkhamer, Lev Ryzhikov, Adel Joobeur, Rob Vink +1 more |
2012-04-17 |
| 8013979 |
Illumination system with low telecentricity error and dynamic telecentricity correction |
Lev Ryzhikov, James Tsacoyeanes, Roberto B. Wiener |
2011-09-06 |
| 7187430 |
Advanced illumination system for use in microlithography |
Mark Oskotsky, Lev Ryzhikov, James Tsacoyeanes, Walter Augustyn |
2007-03-06 |
| 7158307 |
Efficiently illuminating a modulating device |
Wenceslao A. Cebuhar, Jason Hintersteiner |
2007-01-02 |
| 7079321 |
Illumination system and method allowing for varying of both field height and pupil |
Richard Guerra |
2006-07-18 |
| 7006295 |
Illumination system and method for efficiently illuminating a pattern generator |
Wenceslao A. Cebuhar, Jason Hintersteiner |
2006-02-28 |
| 6888615 |
System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field position |
James Tsacoyeanes |
2005-05-03 |
| 6813003 |
Advanced illumination system for use in microlithography |
Mark Oskotsky, Lev Ryzhikov, James Tsacoyeanes, Walter Augustyn |
2004-11-02 |
| 6784976 |
System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control |
James Tsacoyeanes |
2004-08-31 |
| 6775069 |
Advanced illumination system for use in microlithography |
Mark Oskotsky, Lev Ryzhikov, James Tsacoyeanes, Peter Baumgartner, Walter Augustyn |
2004-08-10 |