Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7365848 | System and method using visible and infrared light to align and measure alignment patterns on multiple layers | Pankaj Raval, Lev Ryzhikov | 2008-04-29 |
| 7187430 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes | 2007-03-06 |
| 7164534 | Diffuser plate and method of making same | Richard Gontin | 2007-01-16 |
| 7006198 | System and method for laser beam expansion | James Tsacoyeanes | 2006-02-28 |
| 7002747 | Diffuser plate and method of making same | Richard Gontin | 2006-02-21 |
| 6819402 | System and method for laser beam expansion | James Tsacoyeanes | 2004-11-16 |
| 6813003 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes | 2004-11-02 |
| 6775069 | Advanced illumination system for use in microlithography | Mark Oskotsky, Lev Ryzhikov, Scott Coston, James Tsacoyeanes, Peter Baumgartner | 2004-08-10 |
| 4702603 | Optical phase decoder for interferometers | — | 1987-10-27 |