Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Nash W. ANDERSON +5 more | 2025-03-11 |
| 12198902 | Laminated aerosol deposition coating for aluminum components for plasma processing chambers | Lin Xu, John Daugherty, David Joseph WETZEL | 2025-01-14 |
| 12129569 | Method for conditioning semiconductor processing chamber components | Lin Xu, David Joseph WETZEL, John Daugherty, Hong Shih, Yuanping Song +3 more | 2024-10-29 |
| 11349373 | Radial counter flow jet cooling system | Moonjanattu Mathew Binu | 2022-05-31 |
| 11087961 | Quartz component with protective coating | Lin Xu, Robin KOSHY, John Daugherty, David Joseph WETZEL | 2021-08-10 |
| 10326335 | Radial counter flow jet cooling system | Moonjanattu Mathew Binu | 2019-06-18 |
| 9947558 | Method for conditioning silicon part | Lin Xu, Hong Shih, Robin KOSHY, John Daugherty | 2018-04-17 |
| 8226775 | Methods for particle removal by single-phase and two-phase media | David Mui, Grant Peng, Ji Zhu, Shih-Chung Kon, Dragan Podlesnik +1 more | 2012-07-24 |
| 8211846 | Materials for particle removal by single-phase and two-phase media | David Mui, Grant Peng, Ji Zhu, Shih-Chung Kon, Dragan Podlesnik +1 more | 2012-07-03 |
| 8084406 | Apparatus for particle removal by single-phase and two-phase media | David Mui, Grant Peng, Ji Zhu, Shih-Chung Kon, Dragan Podlesnik +1 more | 2011-12-27 |