Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400835 | Plasma processing method and plasma processing system | Koki MUKAIYAMA, Noboru Saito, Yoshihide Kihara, Maju TOMURA | 2025-08-26 |
| 12387941 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara | 2025-08-12 |
| 11798793 | Substrate processing method, component processing method, and substrate processing apparatus | Koki MUKAIYAMA, Yusuke WAKO, Maju TOMURA, Yoshihide Kihara | 2023-10-24 |
| 11417535 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara | 2022-08-16 |
| 11139169 | Etching method and etching apparatus | Sho Kumakura, Maju TOMURA | 2021-10-05 |