Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Kenneth D. Schatz, Dmitry Lubomirsky, Samartha Subramanya | 2024-02-13 |
| 11373845 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Kenneth D. Schatz, Dmitry Lubomirsky, Samartha Subramanya | 2022-06-28 |
| 9019687 | Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devices | Arthur S. Morris, III, Dana DeReus | 2015-04-28 |