| 11615924 |
MEMS switch |
Shawn Jay Cunningham |
2023-03-28 |
| 11124410 |
Actuator plate partitioning and control devices and methods |
Shawn Jay Cunningham, Arthur S. Morris, III |
2021-09-21 |
| 10882736 |
Semiconductor structures provided within a cavity and related design structures |
Jeffrey C. Maling, Anthony K. Stamper, Arthur S. Morris, III |
2021-01-05 |
| 10840026 |
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods |
Arthur S. Morris, III, Norlito Baytan |
2020-11-17 |
| 10658926 |
Charge pump systems, devices, and methods |
Arthur S. Morris, III, David Zimlich, Vincent Cheung |
2020-05-19 |
| 10640362 |
Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element |
David Molinero-Giles, Shawn Jay Cunningham |
2020-05-05 |
| 10354804 |
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods |
Arthur S. Morris, III, Norito Baytan |
2019-07-16 |
| 10227230 |
Semiconductor structures provided within a cavity and related design structures |
Jeffrey C. Maling, Anthony K. Stamper, Arthur S. Morris, III |
2019-03-12 |
| 10125008 |
Actuator plate partitioning and control devices and methods |
Shawn Jay Cunningham, Arthur S. Morris, III |
2018-11-13 |
| 10081534 |
Semiconductor structures provided within a cavity and related design structures |
Jeffrey C. Maling, Anthony K. Stamper, Arthur S. Morris, III |
2018-09-25 |
| 10062517 |
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods |
Arthur S. Morris, III, Norito Baytan |
2018-08-28 |
| 9695037 |
MEMS die and methods with multiple-pressure sealing |
Arthur S. Morris, III |
2017-07-04 |
| 9156683 |
MEMS die and methods with multiple-pressure sealing |
Arthur S. Morris, III |
2015-10-13 |
| 9102517 |
Semiconductor structures provided within a cavity and related design structures |
Jeffrey C. Maling, Anthony K. Stamper, Arthur S. Morris, III |
2015-08-11 |
| 9019687 |
Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devices |
Arthur S. Morris, III, Saravana Kumar Natarajan |
2015-04-28 |
| 8673671 |
Methods and devices for fabricating tri-layer beams |
Shawn Jay Cunningham, Arthur S. Morris, III |
2014-03-18 |
| 8570705 |
MEMS sprung cantilever tunable capacitors and methods |
— |
2013-10-29 |
| 8420427 |
Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
Shawn Jay Cunningham, Subham Sett, John R. Gilbert |
2013-04-16 |
| 8319393 |
Reduced voltage MEMS electrostatic actuation methods |
— |
2012-11-27 |
| 8319312 |
Devices for fabricating tri-layer beams |
Arthur S. Morris, III, Shawn Jay Cunningham |
2012-11-27 |
| 8264054 |
MEMS device having electrothermal actuation and release and method for fabricating |
Shawn Jay Cunningham, Subham Sett, John R. Gilbert |
2012-09-11 |
| 8059385 |
Substrates with slotted metals and related methods |
Arthur S. Morris, III, Shawn Jay Cunningham |
2011-11-15 |
| 7361962 |
Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods |
Ted Plowman, Randy J. Richards, Arthur S. Morris, III |
2008-04-22 |
| 6876047 |
MEMS device having a trilayered beam and related methods |
Shawn Jay Cunningham, Subham Sett, Svetlana Tatic-Lucic |
2005-04-05 |
| 6876482 |
MEMS device having contact and standoff bumps and related methods |
— |
2005-04-05 |
