| 11615924 |
MEMS switch |
Dana DeReus |
2023-03-28 |
| 11124410 |
Actuator plate partitioning and control devices and methods |
Dana DeReus, Arthur S. Morris, III |
2021-09-21 |
| 10640362 |
Systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element |
David Molinero-Giles, Dana DeReus |
2020-05-05 |
| 10125008 |
Actuator plate partitioning and control devices and methods |
Dana DeReus, Arthur S. Morris, III |
2018-11-13 |
| 8673671 |
Methods and devices for fabricating tri-layer beams |
Dana DeReus, Arthur S. Morris, III |
2014-03-18 |
| 8420427 |
Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch |
Dana DeReus, Subham Sett, John R. Gilbert |
2013-04-16 |
| 8319312 |
Devices for fabricating tri-layer beams |
Arthur S. Morris, III, Dana DeReus |
2012-11-27 |
| 8264054 |
MEMS device having electrothermal actuation and release and method for fabricating |
Dana DeReus, Subham Sett, John R. Gilbert |
2012-09-11 |
| 8059385 |
Substrates with slotted metals and related methods |
Arthur S. Morris, III, Dana DeReus |
2011-11-15 |
| 7385800 |
Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods |
Arthur S. Morris, III |
2008-06-10 |
| 6917086 |
Trilayered beam MEMS device and related methods |
Svetlana Tatic-Lucic |
2005-07-12 |
| 6882264 |
Electrothermal self-latching MEMS switch and method |
— |
2005-04-19 |
| 6876047 |
MEMS device having a trilayered beam and related methods |
Dana DeReus, Subham Sett, Svetlana Tatic-Lucic |
2005-04-05 |
| 6847114 |
Micro-scale interconnect device with internal heat spreader and method for fabricating same |
Subham Sett |
2005-01-25 |
| 6746891 |
Trilayered beam MEMS device and related methods |
Svetlana Tatic-Lucic |
2004-06-08 |