Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125675 | RF pulsing assisted low-k film deposition with high mechanical strength | Bo Xie, Xiaobo Li, Yijun Liu, Li-Qun Xia | 2024-10-22 |
| 12119223 | Single precursor low-k film deposition and UV cure for advanced technology node | Bo Xie, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2024-10-15 |
| 11967498 | Systems and methods for depositing low-k dielectric films | Bo Xie, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2024-04-23 |
| 11830728 | Methods for seamless gap filling of dielectric material | Chengyu Liu, Bo Xie, Xianmin Tang, Yijun Liu, Li-Qun Xia | 2023-11-28 |
| 11621162 | Systems and methods for forming UV-cured low-κ dielectric films | Bo Xie, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-04-04 |
| 11600486 | Systems and methods for depositing low-κdielectric films | Bo Xie, Sure Ngo, Kang Sub Yim, Yijun Liu, Li-Qun Xia | 2023-03-07 |
| 11572622 | Systems and methods for cleaning low-k deposition chambers | Bo Xie, Kang Sub Yim, Yijun Liu, Li-Qun Xia, Sure Ngo | 2023-02-07 |