Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069051 | Transparent wafer center finder | — | 2021-07-20 |
| 10974363 | Monitoring of pneumatic connection to carrier head | — | 2021-04-13 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Roger M. Johnson, Michael S. Cox | 2021-02-23 |
| 10564609 | Controller for treatment of semiconductor processing equipment effluent | — | 2020-02-18 |
| 10452111 | Enhanced re-hosting capability for legacy hardware and software | Mark Roger Covington, Suresh Kumaraswami, Amitabh Puri | 2019-10-22 |
| 10153143 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Roger M. Johnson, Michael S. Cox | 2018-12-11 |
| 10037064 | Enhanced re-hosting capability for legacy hardware and software | Mark Roger Covington, Suresh Kumaraswami, Amitabh Puri | 2018-07-31 |
| 9987718 | Pneumatic connection to carrier head | — | 2018-06-05 |
| 9892947 | Sensor system for semiconductor manufacturing apparatus | Raphael Dascoli, Shivan Bhargava | 2018-02-13 |
| 9779917 | Process chamber gas flow improvements | Stanley Detmar, Brian T. West | 2017-10-03 |
| 9383739 | Enhanced re-hosting capability for legacy hardware and software | Mark Roger Covington, Suresh Kumaraswami, Amitabh Puri | 2016-07-05 |
| 9243319 | Sensor system for semiconductor manufacturing apparatus | Raphael Dascoli, Shivan Bhargava | 2016-01-26 |
| 9168629 | Detecting membrane breakage in a carrier head | — | 2015-10-27 |
| 8994950 | Methods and apparatus for sensing a substrate in a chamber | — | 2015-03-31 |
| 8828182 | Process chamber gas flow improvements | Stanley Detmar, Brian T. West | 2014-09-09 |
| 8649017 | Methods and apparatus for sensing a substrate in a chamber | — | 2014-02-11 |
| 8539257 | Method and apparatus for detecting an idle mode of processing equipment | — | 2013-09-17 |
| 8346980 | Modular input/output bridge system for semiconductor processing equipment | — | 2013-01-01 |
| 8333939 | High temperature optical sensor device for substrate fabrication equipment | — | 2012-12-18 |
| 8255606 | Remote access gateway for semiconductor processing equipment | — | 2012-08-28 |
| 8135560 | Sensor system for semiconductor manufacturing apparatus | Raphael Dascoli, Shivan Bhargava | 2012-03-13 |
| 8064070 | Methods and apparatus for an integral local substrate center finder for I/O and chamber slit valves | — | 2011-11-22 |
| 7835007 | Methods and apparatus for identifying thin films on a substrate | — | 2010-11-16 |
| 7185760 | Non-contact protective packaging for surface-sensitive articles | Jim Wang, Hong Wang, Brian T. West, Yongxiang He | 2007-03-06 |
| 7158857 | Method and apparatus for aligning a cassette | Alan Rick Lappen, David Tuttle | 2007-01-02 |