Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10286452 | Three-dimensional printing and three-dimensional printers | Benyamin Buller, Zachary Ryan Murphree, Richard J. Romano, Thomas Brezoczky, Alan Rick Lappen | 2019-05-14 |
| 9255323 | Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube | Heinrich Von Bunau, Mark Campello, Ron Rulkens, Tom Heckel, Johannes Vlcek | 2016-02-09 |
| 6760976 | Method for active wafer centering using a single sensor | Dhairya Shrivastava, Matthew J. Weis | 2004-07-13 |
| 6500321 | Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target | Kaihan Ashtiani, Larry D. Hartsough, Richard S. Hill, Karl B. Levy | 2002-12-31 |
| 6497734 | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput | Kenneth K. Barber, Mark Fissel, Soo Yun Joh, Mukul Khosla, Karl B. Levy +2 more | 2002-12-24 |
| 6413381 | Horizontal sputtering system | Ken Kinsun Lee, Ke Ling Lee, Mingwei Jiang | 2002-07-02 |
| 6406598 | System and method for transporting and sputter coating a substrate in a sputter deposition system | Ke Ling Lee, Mikhail Mazur, Ken Kinsun Lee | 2002-06-18 |
| 6264804 | System and method for handling and masking a substrate in a sputter deposition system | Ke Ling Lee, Mikhail Mazur, Ken Kinsun Lee | 2001-07-24 |