Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177412 | Sputter deposition apparatus including roller assembly and method | Thomas Heckel | 2021-11-16 |
| 9255323 | Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube | Robert Martinson, Mark Campello, Ron Rulkens, Tom Heckel, Johannes Vlcek | 2016-02-09 |