Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11027974 | Removal of moisture from hydrazine | Hideharu Shimizu, Mark Raynor, Daniel Joseph Tempel, Daniel Alvarez, Jr. | 2021-06-08 |
| 8299286 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Thomas H. Baum, Douglas Gordon, Timothy E. Glassman, Sofia Pombrik, Brian A. Vaartstra +1 more | 2012-10-30 |
| 7323581 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Thomas H. Baum, Timothy E. Glassman, Sophia Pombrik, Brian A. Vaastra, Peter S. Kirlin +1 more | 2008-01-29 |
| 6126996 | Metal complex source reagents for chemical vapor deposition | Peter S. Kirlin, Duncan W. Brown, Thomas W. Baum, Brian A. Vaarstra | 2000-10-03 |
| 6110529 | Method of forming metal films on a substrate by chemical vapor deposition | Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman, Sofia Pombrik +1 more | 2000-08-29 |
| 5919522 | Growth of BaSrTiO.sub.3 using polyamine-based precursors | Thomas H. Baum, Gregory T. Stauf, Peter S. Kirlin, Duncan W. Brown, Gautam Bhandari +1 more | 1999-07-06 |
| 5840897 | Metal complex source reagents for chemical vapor deposition | Peter S. Kirlin, Duncan W. Brown, Thomas H. Baum, Brian A. Vaarstra | 1998-11-24 |
| 5820664 | Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same | Peter S. Kirlin, Thomas H. Baum, Douglas Gordon, Timothy E. Glassman, Sofia Pombrik +1 more | 1998-10-13 |
| 5711816 | Source reagent liquid delivery apparatus, and chemical vapor deposition system comprising same | Peter S. Kirlin, Robin L. Binder, Peter C. Van Buskirk, Gregory T. Stauf, Jiming Zhang | 1998-01-27 |
| 5705443 | Etching method for refractory materials | Gregory T. Stauf, Peter S. Kirlin, Peter C. Van Buskirk | 1998-01-06 |
| 5536323 | Apparatus for flash vaporization delivery of reagents | Peter S. Kirlin, Robin L. Binder, Peter Buskirk, Jiming Zhang, Gregory T. Stauf | 1996-07-16 |
| 5453494 | Metal complex source reagents for MOCVD | Peter S. Kirlin, Duncan W. Brown | 1995-09-26 |
| 5431957 | Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids | Peter S. Kirlin | 1995-07-11 |
| 5362328 | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem | Peter C. Van Buskirk, Peter S. Kirlin | 1994-11-08 |
| 5337651 | Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids | Peter S. Kirlin | 1994-08-16 |
| 5280012 | Method of forming a superconducting oxide layer by MOCVD | Peter S. Kirlin, Duncan W. Brown | 1994-01-18 |
| 5225561 | Source reagent compounds for MOCVD of refractory films containing group IIA elements | Peter S. Kirlin, Duncan W. Brown | 1993-07-06 |
| 5204314 | Method for delivering an involatile reagent in vapor form to a CVD reactor | Peter S. Kirlin, Robin L. Binder | 1993-04-20 |