Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7323581 | Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition | Robin A. Gardiner, Thomas H. Baum, Timothy E. Glassman, Brian A. Vaastra, Peter S. Kirlin +1 more | 2008-01-29 |