Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7800075 | Multi-function module for an electron beam column | Benyamin Buller, William J. DeVore, Juergen Frosien, Xinrong Jiang, Henry Pearce-Percy +3 more | 2010-09-21 |
| 7514682 | Electron anti-fogging baffle used as a detector | Benyamin Buller, William J. DeVore, Juergen Frosien, Henry Pearce-Percy, Dieter Winkler | 2009-04-07 |
| 7498591 | Critical dimension effects correction in raster pattern generator | Benyamin Buller | 2009-03-03 |
| 7476879 | Placement effects correction in raster pattern generator | Benyamin Buller | 2009-01-13 |
| 7476880 | Writing a circuit design pattern with shaped particle beam flashes | Benyamin Buller, Robert Sills | 2009-01-13 |
| 7427765 | Electron beam column for writing shaped electron beams | Benyamin Buller, William J. DeVore, Juergen Frosien, Xinrong Jiang, Henry Pearce-Percy +3 more | 2008-09-23 |
| 7244953 | Beam exposure writing strategy system and method | Benyamin Buller | 2007-07-17 |
| 7209055 | Electrostatic particle beam deflector | Scott Stovall | 2007-04-24 |
| 6912323 | Method and apparatus for fast signal convolution using separated-spline kernel | David Jeremy Copeland, Richard E. Crandall, Ulrich Hofmann | 2005-06-28 |
| 6436607 | Border modification for proximity effect correction in lithography | Andrew J. Muray, Allen M. Carroll | 2002-08-20 |