Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8273523 | By-die-exposure for patterning of holes in edge die | Shangting Detweiler, Basab Chatterjee, Chris Atkinson | 2012-09-25 |
| 8273645 | Method to attain low defectivity fully silicided gates | Mark Visokay, Freidoon Mehrad, Yaw S. Obeng | 2012-09-25 |
| 7897410 | Close proximity scanning surface contamination analyzer | Sean Collins, Jeffrey W. Ritchison, Kelly Taylor | 2011-03-01 |
| 7772867 | Structures for testing and locating defects in integrated circuits | Toan Tran, Deepak A. Ramappa | 2010-08-10 |
| 7601629 | Semiconductive device fabricated using subliming materials to form interlevel dielectrics | Deepak A. Ramappa, Asad Haider, Frank Poag | 2009-10-13 |
| 7598507 | Adjustable lithography blocking device and method | Basab Chatterjee, Keith Melcher | 2009-10-06 |
| 7596456 | Method and apparatus for cassette integrity testing using a wafer sorter | Kelly C. Mollenkopf, Chris Atkinson | 2009-09-29 |
| 7579541 | Automatic page sequencing and other feedback action based on analysis of audio performance data | — | 2009-08-25 |
| 7374866 | System and method for exposure of partial edge die | Chris Atkinson, Shangting Detweiler | 2008-05-20 |
| 7228193 | Methods for detecting structure dependent process defects | Jae Hyun Park, Deepak A. Ramappa | 2007-06-05 |
| 7212607 | X-ray confocal defect detection systems and methods | Satyavolu Srinivas Papa Rao, Basab Chatterjee | 2007-05-01 |
| 7171035 | Alignment mark for e-beam inspection of a semiconductor wafer | Karanpreet Chahal | 2007-01-30 |
| 7112540 | Pretreatment for an electroplating process and an electroplating process in including the pretreatment | Deepak A. Ramappa | 2006-09-26 |
| 7024950 | Method for intelligent sampling of particulates in exhaust lines | J. Michael Grobelny | 2006-04-11 |
| 6975920 | In-situ randomization and recording of wafer processing order at process tools | Randolph W. Kahn, Kenneth G. Vickers, Edward J. Leonard, Yaojian Leng | 2005-12-13 |
| 6967110 | Sensitive test structure for assessing pattern anomalies | Howard L. Tigelaar, Anand J. Reddy | 2005-11-22 |
| 6862495 | In-situ randomization and recording of wafer processing order at process tools | Randolph W. Kahn, Kenneth G. Vickers, Edward J. Leonard, Yaojian Leng | 2005-03-01 |
| 6848066 | Error reduction in semiconductor processes | Chris Atkinson, Keith Melcher | 2005-01-25 |
| 6834117 | X-ray defect detection in integrated circuit metallization | Satyavolu Papa Rao, Basab Chatterjee | 2004-12-21 |
| 6710364 | Semiconductor wafer edge marking | Keith Melcher, John P. Williston | 2004-03-23 |
| 6689686 | System and method for electroplating fine geometries | Wei-Yung Hsu | 2004-02-10 |
| 6684125 | In-situ randomization and recording of wafer processing order at process tools | Randolph W. Kahn, Kenneth G. Vickers, Edward J. Leonard, Yaojian Leng | 2004-01-27 |
| 6645684 | Error reduction in semiconductor processes | Chris Atkinson, Keith Melcher | 2003-11-11 |
| 6572461 | Method for producing wafer notches with rounded corners and a tool therefor | James Garvin, Moitreyee Mukerjee-Roy | 2003-06-03 |
| 6488037 | Programmable physical action during integrated circuit wafer cleanup | — | 2002-12-03 |