Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107675 | CVD Mo deposition by using MoOCl4 | Thomas H. Baum, Philip S. H. Chen, Robert Wright, Jr., Bryan C. Hendrix, Shuang Meng | 2021-08-31 |
| 10453744 | Low temperature molybdenum film deposition utilizing boron nucleation layers | Shuang Meng, Thomas H. Baum, Bryan C. Hendrix | 2019-10-22 |