Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8906456 | Apparatus and method for high-throughput chemical vapor deposition | Peter Baumann, Marcus Schumacher, Johannes Lindner, Antonio Mesquida Küsters | 2014-12-09 |
| 6908838 | Method and device for treating semiconductor substrates | — | 2005-06-21 |
| 6849241 | Device and method for depositing one or more layers on a substrate | Martin Dauelsberg, Marcus Schumacher, Holger Juergensen, Gerd Strauch | 2005-02-01 |
| 6089548 | Process and device for converting a liquid stream flow into a gas stream flow | Lothar Pfitzner, Heiner Ryssel, Georg Roeder | 2000-07-18 |