Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5225024 | Magnetically enhanced plasma reactor system for semiconductor processing | Stephen E. Savas, Karl B. Levy, Neeta Jha, Kevin G. Donohoe | 1993-07-06 |
| 4851691 | Method for photoresist pretreatment prior to charged particle beam processing | — | 1989-07-25 |
| 4458746 | Optimum surface contour for conductive heat transfer with a thin flexible workpiece | Scott C. Holden | 1984-07-10 |
| 4367411 | Unitary electromagnet for double deflection scanning of charged particle beam | Norman L. Turner | 1983-01-04 |